R. . Al-hassan, E. D. Azundow, Y. A. Sam-Okyere, E. . Osei-Kwame, and N. A. F. Aryee, “Future Directions in Semiconductor Processing: Scaling, Integration, and the Sustainability Imperative”, Appl. Eng. Innov. Tech., vol. 3, no. 1, pp. 1–14, May 2026, doi: 10.62777/aeit.v3i1.97.