AL-HASSAN, Ramatu; AZUNDOW, Edmun Dasori; SAM-OKYERE, Yaw Amankrah; OSEI-KWAME, Emmanuel; ARYEE, Nii Ayitey Freddie. Future Directions in Semiconductor Processing: Scaling, Integration, and the Sustainability Imperative. Applied Engineering, Innovation, and Technology, [S. l.], v. 3, n. 1, p. 1–14, 2026. DOI: 10.62777/aeit.v3i1.97. Disponível em: https://journal.msdinstitute.org/index.php/AEIT/article/view/97.. Acesso em: 7 jun. 2026.